高分辨肖特基场发射扫描电镜-光衍未来

高分辨肖特基场发射扫描电镜

立即预约

附件下载

设备简介

主要功能：Quattro S是一台将扫描电镜成像性能与环境模式（ESEM）相结合的电镜。它具备三种真空操作模式（高真空、低真空和环境真空），使得SEM的样品类型具备了更多的灵活性，包括放气或者是与真空状态不相容的样品。环境真空模式还可实现对现实世界条件的模拟，对样品进行原位研究，例如潮湿、热或反应性的环境满足低真空样品和原位观察分析的电镜需求。 The Quattro SEM combines topography SEM analysis with Environmental Scanning Electron Microscope mode(ESEM). It has three vacuum modes(high vacuum, low vacuum, and ESEM), which provides more flexibility for samples, including outgassing ones or poor accomodation by high vacuum. In-situ observation is possible at ESEM mode (up to 4000 Pa), along with other tunable 'real world' chamber conditions, including temperature, humidity, and partial pressure of reactive gases. This SEM is fully equipped with extensive analytical and in-situ capabilities for its unique tunable environmental conditions.
主要技术指标：高真空分辨率：30 kV下≤0.8 nm (STEM),≤1.0 nm (SE),≤2.5 nm (BSE)；1kV下≤3.0nm（SE）；低真空分辨率：30 kV下≤1.3 nm (SE)，≤2.5 nm (BSE)；3kV下≤3.0nm（SE）；环境真空分辨率：30 kV下≤1.3 nm (SE) 配备能谱仪：有效晶体面积100mm2，高分子超薄窗设计，无需液氮冷却帕尔贴冷台1套，控温范围-20~60℃；帕尔帖冷台集成式STEM 1套，用于观察湿薄样品；低真空/环境真空加热台，最高加热温度1400℃； High Vacuum Resolution: 30 kV≤0.8 nm (STEM),≤1.0 nm (SE),≤2.5 nm (BSE)；1kV≤3.0nm（SE） Low Vacuum Resolution：30 kV≤1.3 nm (SE)，≤2.5 nm (BSE)；3kV≤3.0nm（SE）； ESEM Resolution：30 kV≤1.3 nm (SE) EDS Detector: possible sensor size up to 100mm2; Cooling Stage:-20~60℃ for bulk samples; WetSTEM :-20~60℃ for thin samples; Heating Stage: up to 1400℃
主要学科领域：材料科学
服务内容：Quattro S是一台将扫描电镜成像性能与环境模式（ESEM）相结合的电镜。它具备三种真空操作模式（高真空、低真空和环境真空），使得SEM的样品类型具备了更多的灵活性，包括放气或者是与真空状态不相容的样品。环境真空模式还可实现对现实世界条件的模拟，对样品进行原位研究，例如潮湿、热或反应性的环境满足低真空样品和原位观察分析的电镜需求。 The Quattro SEM combines topography SEM analysis with Environmental Scanning Electron Microscope mode(ESEM). It has three vacuum modes(high vacuum, low vacuum, and ESEM), which provides more flexibility for samples, including outgassing ones or poor accomodation by high vacuum. In-situ observation is possible at ESEM mode (up to 4000 Pa), along with other tunable 'real world' chamber conditions, including temperature, humidity, and partial pressure of reactive gases. This SEM is fully equipped with extensive analytical and in-situ capabilities for its unique tunable environmental conditions.
用户须知：